Seal monitor for probe or test chamber

2024年3月15日发(作者：)

专利内容由知识产权出版社提供

专利名称：Seal monitor for probe or test chamber

发明人：Adolphus E. McClanahan,Alan J.

Wegleitner,Daniel A. Fresquez,Mark Damone

Gillette

申请号：US14836616

申请日：20150826

公开号：US10732218B2

公开日：20200804

专利附图：

摘要：A method of checking a seal of a probe chamber or test chamber (thermal

chamber) during a freezing temperature chamber condition. The thermal chamber

provided includes a probe card or a contactor for electrically testing a semiconductor

device under test (DUT), a gas inlet, a chiller which provides a freezing chamber

temperature, and a pressure sensor for sensing a pressure in the thermal chamber

(chamber pressure). Using the pressure sensor, the chamber pressure is sensed while

flowing a dry gas through the gas inlet sufficient to render the chamber pressure a

positive pressure. The positive pressure is compared to a reference pressure, and from

the comparing it is determined whether the thermal chamber is properly sealed.

申请人：Texas Instruments Incorporated

地址：Dallas TX US

国籍：US

代理人：Ronald O. Neerings,Charles A. Brill,Frank D. Cimino

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